000 00427nam a2200109Ia 4500
008 160615s9999||||xx |||||||||||||| ||und||
008 160616s 000 0
100 _aCrowder, Billy L, Ed.
245 _aIon implantation in semiconductors and other materials
942 _cBK
_2BK28022
080 _a537.311 CRO
999 _c28022
_d28022