| 000 | 00513nam a2200205 4500 | ||
|---|---|---|---|
| 008 | 160616sBerlin 000 0 | ||
| 245 | _aLaser-Assisted Microtechnology : (MS 19) | ||
| 100 | _aMetev, Simeon M. | ||
| 100 | _aVeiko, Vadim P. | ||
| 250 | _a2nd Updated | ||
| 260 | _aBerlin | ||
| 260 | _bSpringer | ||
| 260 | _cBerlin | ||
| 300 | _a270 | ||
| 440 | _aMaterial Science, 19 | ||
| 020 | _a3 540 63973 X | ||
| 650 |
_aLaser _aMicrotechnology |
||
| 942 |
_cBK _2BK17049 |
||
| 080 | _a535.421 MET | ||
| 999 |
_c17049 _d17049 |
||