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|---|---|---|---|
| 008 | 160616s2001 000 0 | ||
| 245 | _aPlasma Charging Damage | ||
| 100 | _aCheung, Kin P. | ||
| 260 | _aLondon | ||
| 260 | _bSpringer | ||
| 260 | _c2001 | ||
| 300 | _a346 | ||
| 020 | _a1 8523 144 5 | ||
| 650 |
_aSemiconductors - Effect of Radiation on- _aMetal Oxide Semiconductors - Defects _aPlasma Radiation |
||
| 942 |
_cBK _2BK16521 |
||
| 080 | _a533.9 CHE | ||
| 999 |
_c16521 _d16521 |
||